Bewise Inc. www.tool-tool.com Reference source from the internet.
電子迴旋加速器為日本於1982年開發出來,係利用電子在磁場中迴旋的頻 率和微波的頻率2.45GHz一致時,會合微波產生共振現象,而在低壓下吸收高強度的微波功率形成高密度電漿。當電子受一磁場作用時,電子會繞著磁力線作 螺旋軌跡圓週運動,其所受的向心力來自於與磁場的作用,由公式計算得知當B=875G時,電子的迴旋頻率和微波的2.45GHz一樣,因而可共振吸收微 波。 圖十一:典型ECR系統(a)系統結構(b)軸向磁場變化,顯示有一或多個共振區,視磁場數目而定。HeliconHelicon反應器係利用天線配合磁 場產生helicon wave以形成極高密度電漿。典型Helicon反應器及天線設計如圖十二所示:利用天線產生電磁波與軸向的磁場形成helicon wave,此波即可傳遞藉由碰撞振動(Collision damping)及非碰撞蘭道振動(Collisionless Laudau damping)將本身能量傳遞給電漿。Helicon Wave其傳遞沿著軸向,而在徑向形成駐波,其截面形成波形圖案如圖十三所示,實際Helicon反應器如圖十四、圖十五所示。
(圖十一、典型ECR系統 (a)系統結構(b)軸向磁場變化)
(圖十二、上圖為 Helicon 右手螺旋天線;下圖為左手螺旋天線設計)
(圖十三、Helicon 反應器截面波形分佈,其中實線為磁力等位線,虛線為電力等位線)
(圖十四、由 Lucas Signaton 公司出產 Vortex Helicon Etcher)
(圖十五、Helicon 反應器結構圖(MØRITM Helicon Reactor))
參
考文獻:
1. B. N. Chapman, Glow Discharge Processes, John Wiley &
Sons, 19802. J. L. Vossen, W. Kern, Thin Film Processes II, Academic
Press, 19913. M. A. Lieberman, A. J. Lichtenberg, Principles of Plasma
Discharges and Materials Processing, John Wiley & Sons, 19944. M.
Konuma, Film Deposition by Plasma Techniques, Springer-Verlag, 19925.
洪昭南, 電漿反應器, 化工技術, 19956. 洪昭南, 郭有斌, 以化學氣相沉積法成長半導體薄膜, 化工技術, 2000
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Welcome to BW tool world! We are an experienced tool maker specialized in cutting tools. We focus on what you need and endeavor to research the best cutter to satisfy users’ demand. Our customers involve wide range of industries, like mold & die, aerospace, electronic, machinery, etc. We are professional expert in cutting field. We would like to solve every problem from you. Please feel free to contact us, its our pleasure to serve for you. BW product including: cutting tool、aerospace tool .HSS DIN Cutting tool、Carbide end mills、Carbide cutting tool、NAS Cutting tool、NAS986 NAS965 NAS897 NAS937orNAS907 Cutting Tools,Carbide end mill、disc milling cutter,Aerospace cutting tool、hss drill’Фрезеры’Carbide drill、High speed steel、Compound Sharpener’Milling cutter、INDUCTORS FOR PCD’CVDD(Chemical Vapor Deposition Diamond )’PCBN (Polycrystalline Cubic Boron Nitride) ’Core drill、Tapered end mills、CVD Diamond Tools Inserts’PCD Edge-Beveling Cutter(Golden Finger’PCD V-Cutter’PCD Wood tools’PCD Cutting tools’PCD Circular Saw Blade’PVDD End Mills’diamond tool. INDUCTORS FOR PCD . POWDER FORMING MACHINE ‘Single Crystal Diamond ‘Metric end mills、Miniature end mills、Специальные режущие инструменты ‘Пустотелое сверло ‘Pilot reamer、Fraises’Fresas con mango’ PCD (Polycrystalline diamond) ‘Frese’POWDER FORMING MACHINE’Electronics cutter、Step drill、Metal cutting saw、Double margin drill、Gun barrel、Angle milling cutter、Carbide burrs、Carbide tipped cutter、Chamfering tool、IC card engraving cutter、Side cutter、Staple Cutter’PCD diamond cutter specialized in grooving floors’V-Cut PCD Circular Diamond Tipped Saw Blade with Indexable Insert’ PCD Diamond Tool’ Saw Blade with Indexable Insert’NAS tool、DIN or JIS tool、Special tool、Metal slitting saws、Shell end mills、Side and face milling cutters、Side chip clearance saws、Long end mills’end mill grinder’drill grinder’sharpener、Stub roughing end mills、Dovetail milling cutters、Carbide slot drills、Carbide torus cutters、Angel carbide end mills、Carbide torus cutters、Carbide ball-nosed slot drills、Mould cutter、Tool manufacturer.
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BW is specialized in R&D and sourcing the most advanced carbide material with high-tech coating to supply cutting / milling tool for mould & die, aero space and electronic industry. Our main products include solid carbide / HSS end mills, micro electronic drill, IC card cutter, engraving cutter, shell end mills, cutting saw, reamer, thread reamer, leading drill, involute gear cutter for spur wheel, rack and worm milling cutter, thread milling cutter, form cutters for spline shaft/roller chain sprocket, and special tool, with nano grade. Please visit our web www.tool-tool.com for more info.
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