單 位:明道管理學院
碧威股份有限公司
www.tool-tool.com
Bewise Inc.
轉述:
(9). 製程電壓vs.鞘層厚度
(10). 入射角度vs.植入劑量
(11). 非導體工件於PIII 系統之電位關係
(12). 金屬網裝置(Metal grid)解決處理非導體工件之問題
五.金屬蒸氣真空弧離子源 MEVVA ( Metal Vapor Vacuum Arc)
(1). 工作原理與特性
*工作原理:利用陰極真空弧放電，由陰極表面直接產生高密度金屬電漿，經多孔三電極系統引出，形成強流金屬離子束。 MEVVA源由金屬電漿形成區和離子束引出區二部分組成。前者包括陰極、陽極和觸發極組成，後者由多孔三電極引出系統組成。
*特點: MEVVA離子源是在脈衝狀態下工作的一種強流金屬離子源，具有束流強、金屬離子種類多、離子電荷態高、束流純度高、束斑面積大以及結構簡單、穩定、可靠等獨特的優點。
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Bewise Inc. www.tool-tool.com
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