BW薄 膜 材 料 技 術1-9www.tool-tool.com
(a)
圖示：
(b)
(a)濺鍍沉積時間1小時之試片截面，此via深1μm、寬0.5μm，深寬比約2：1。(b)與左圖有相同製程條件的試片，via最底層明顯已經有銅晶種層填入。
圖示：
濺鍍沉積時間為30分鐘，已有銅晶種層沉積，深
度約1μm、寬0.35μm，比例3:1的via試片截面。
圖示：
離子束濺鍍沉積30分鐘後，在無電鍍液中反應3秒鐘之試片截面，在上層的壁上有銅晶粒附著，其晶粒相當細小，深度約1μm、寬0.35μm，比例
3:1的via試片截面。
碧威股份有限公司www.tool-tool.com
國立勤益技術大學機械系
教授：張子欽博士
Welcome to BW tool world! We are an experienced tool maker specialized in cutting tools. We focus on what you need and endeavor to research the best cutter to satisfy users’ demand. Our customers involve wide range of industries, like mold & die, aerospace, electronic, machinery, ,,,etc. We are professional expert in cutting field. We would like to solve every problem from you. Please feel free to contact us, it’s our pleasure to serve for you. BW product including: utting tool、aerospace tool .HSS Cutting tool、Carbide end mills、Carbide cutting tool、NAS Cutting tool、Carbide end mill、Aerospace cutting tool、Carbide drill、High speed steel、Milling cutter、Core drill、Taperd end mills、Metric end mills、Miniature end mills、Pilot reamer、Electronics cutter、Step drill、Metal cutting saw、Double margin drill、Gun barrel、Angle milling cutter、Carbide burrs、Carbide tipped cutter、Chamfering tool、IC card engraving cutter、Side cutter、NAS tool、DIN tool、Special tool、Metal slitting saws、Shell end mills、Side and face milling cutters、Side chip clearance saws、Long end mills、Stub roughing end mills、Dovetail milling cutters、Carbide slot drills、Carbide torus cutters、Angeled carbide end mills、Carbide torus cutters、Carbide ball-noseed slot drills、Mould cutter、Tool manufacturer.
Bewise Inc. www.tool-tool.com
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