Bewise Inc.


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轉述


A.微觀結構

 


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(c)C+/TiN (TiN 植入 C+ )
CAE製程前於界面植入適當劑量有助於後續鍍膜成長之緻密性。
表面活化dislocation density增加提昇nucleation sites 。
磨耗壽命量測


 


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Ti2+/TiN 與 C+/TiN之磨耗壽命 分別為CAE-TiN 的1.7 和1.4 倍。
離子束濺鍍沉積應用於超大型
積體電路之銅製程研究
(NSC90-2626-E-167-001)
離子束濺鍍沉積法(IBSD)的工作原理是將氬氣(Ar)離子化後施加電壓使其加速轟擊銅靶,在氬離子撞擊銅靶之前,會先通過中和絲極使表面電荷被中和。銅靶被氬離子以斜角撞擊後,被擊出的銅原子會飛出而沉積在基材上。

 


 


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表面濺射原理示意圖
離子束濺鍍沉積參數
離子束濺鍍沉積主要控制參數有離子束電流、離子束電壓、沉積速率、沉積時間。固定工作壓力為3.4*10-4 torr,調變其中一項參數值,比較不同參數條件下對晶種層的影響。


碧威股份有限公司www.tool-tool.com
國立勤益技術大學機械系
教授:張子欽博士

Welcome to BW tool world!  We are an experienced tool maker specialized in cutting tools.  We focus on what you need and endeavor to research the best cutter to satisfy users’ demand.  Our customers involve wide range of industries, like mold & die, aerospace, electronic, machinery, ,,,etc.  We are professional expert in cutting field.  We would like to solve every problem from you.  Please feel free to contact us, it’s our pleasure to serve for you.     BW product including: utting toolaerospace tool .HSS Cutting toolCarbide end millsCarbide cutting toolNAS Cutting toolCarbide end millAerospace cutting toolCarbide drillHigh speed steelMilling cutterCore drillTaperd end millsMetric end millsMiniature end millsPilot reamerElectronics cutterStep drillMetal cutting sawDouble margin drillGun barrelAngle milling cutterCarbide burrsCarbide tipped cutterChamfering toolIC card engraving cutterSide cutterNAS toolDIN toolSpecial toolMetal slitting sawsShell end millsSide and face milling cuttersSide chip clearance sawsLong end millsStub roughing end millsDovetail milling cuttersCarbide slot drillsCarbide torus cuttersAngeled carbide end millsCarbide torus cuttersCarbide ball-noseed slot drillsMould cutterTool manufacturer.

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